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Search for "molecular layer deposition (MLD)" in Full Text gives 6 result(s) in Beilstein Journal of Nanotechnology.

Role of titanium and organic precursors in molecular layer deposition of “titanicone” hybrid materials

  • Arbresha Muriqi and
  • Michael Nolan

Beilstein J. Nanotechnol. 2022, 13, 1240–1255, doi:10.3762/bjnano.13.103

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  • growth could be achieved. Keywords: density functional theory (DFT) studies; double reactions; surface chemistry; titanicone; Introduction Molecular layer deposition (MLD), a thin film deposition technique, has attracted significant attention in recent years as a suitable approach for the deposition of
  • Arbresha Muriqi Michael Nolan Tyndall National Institute, University College Cork, Lee Maltings, T12 R5CP Cork, Ireland 10.3762/bjnano.13.103 Abstract The development of hybrid inorganic–organic films with well-controlled properties is important for many applications. Molecular layer deposition
  • (MLD) allows the deposition of these hybrid films using sequential, self-limiting reactions, similar to atomic layer deposition (ALD). In this paper, we use first principles density functional theory (DFT) to investigate the growth mechanism of titanium-containing hybrid organic–inorganic MLD films
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Published 02 Nov 2022

Design of surface nanostructures for chirality sensing based on quartz crystal microbalance

  • Yinglin Ma,
  • Xiangyun Xiao and
  • Qingmin Ji

Beilstein J. Nanotechnol. 2022, 13, 1201–1219, doi:10.3762/bjnano.13.100

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  • ) nm. The QCM measurements exhibited a 690 ng/cm2 difference between the adsorption amount of ᴅ- and ʟ-tartaric acid, and it proved the enantioselective adsorption on the chirality imprinted Al2O3 films. Yemini et al. reported the fabrication of Zn/Cys chiral nanostructures by molecular layer
  • deposition (MLD) using diethylzinc (DEZn) as the inorganic precursor and Cys enantiomer as the chiral organic precursor [122]. The Zn/Cys nanostructures showed a size of 15 nm and could tightly aggregate into a homogeneous and continuous film on the QCM surface. The QCM adsorption results indicated that ʟ
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Published 27 Oct 2022

On the transformation of “zincone”-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition

  • Alberto Perrotta,
  • Julian Pilz,
  • Stefan Pachmajer,
  • Antonella Milella and
  • Anna Maria Coclite

Beilstein J. Nanotechnol. 2019, 10, 746–759, doi:10.3762/bjnano.10.74

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  • crystal growth occurred, giving insights in the manufacturing of nanoporous ZnO from Zn-based hybrid materials. Keywords: calcination; PE-ALD; porosity; thin films; ZnO; Introduction Atomic layer deposition (ALD) and molecular layer deposition (MLD) are sequential self-limiting vapor-phase deposition
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Published 21 Mar 2019

Biocompatible organic–inorganic hybrid materials based on nucleobases and titanium developed by molecular layer deposition

  • Leva Momtazi,
  • Henrik H. Sønsteby and
  • Ola Nilsen

Beilstein J. Nanotechnol. 2019, 10, 399–411, doi:10.3762/bjnano.10.39

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  • combining titanium tetra-isopropoxide (TTIP) and the nucleobases thymine, uracil or adenine using the molecular layer deposition (MLD) approach. Such materials have potential as bioactive coatings, and the bioactivity of these films is described in our recent work [Momtazi, L.; Dartt, D. A.; Nilsen, O
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Published 08 Feb 2019

Vapor deposition routes to conformal polymer thin films

  • Priya Moni,
  • Ahmed Al-Obeidi and
  • Karen K. Gleason

Beilstein J. Nanotechnol. 2017, 8, 723–735, doi:10.3762/bjnano.8.76

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  • coats the substrate geometry (Figure 1c) [1]. Several chemical vapor deposition (CVD) techniques result in highly conformal polymer films. For instance, emerging techniques such as molecular layer deposition (MLD) and oxidative CVD (oCVD) form conformal metalucone and step-growth polymer films [10][11
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Published 28 Mar 2017

Organic and inorganic–organic thin film structures by molecular layer deposition: A review

  • Pia Sundberg and
  • Maarit Karppinen

Beilstein J. Nanotechnol. 2014, 5, 1104–1136, doi:10.3762/bjnano.5.123

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  • inorganic thin films, i.e., atomic layer deposition (ALD), is currently experiencing a strongly growing interest. Like ALD in case of the inorganics, the emerging molecular layer deposition (MLD) technique for organic constituents can be employed to fabricate high-quality thin films and coatings with
  • . Such layer-engineered and/or nanostructured hybrid materials with exciting combinations of functional properties hold great promise for high-end technological applications. Keywords: atomic layer deposition (ALD); hybrid inorganic–organic thin films; molecular layer deposition (MLD); nanolaminates
  • was fundamentally broadened by experiments producing organic polymers in the 1990s by a variant of ALD, now commonly known as molecular layer deposition (MLD), named after the molecular layer-by-layer fashion the film grows during the deposition [5][6][7][8][9]. Then – most excitingly – in the late
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Published 22 Jul 2014
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